@Article{PillacaRamGutLugTra:2019:DLDeIn,
author = "Pillaca, Elver Juan de Dios Mitma and Ram{\'{\i}}rez Ramos,
Marco Antonio and Gutierrez Bernal, Jes{\'u}s Manuel and Lugo
Gonz{\'a}lez, Dubrazkha Carolina and Trava-Airoldi, Vladimir
Jesus",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)} and {Universidad Nacional
de Colombia} and {Instituto Nacional de Pesquisas Espaciais
(INPE)} and {Instituto Nacional de Pesquisas Espaciais (INPE)}",
title = "DLC deposition inside of a long tube by using the pulsed-DC PECVD
process",
journal = "Surface and Coatings Technology",
year = "2019",
volume = "359",
pages = "55--61",
month = "Feb.",
keywords = "Electric discharge, DLC, PECVD, Coating inside of the tube,
Temperature.",
abstract = "In this study, the pulsed-DC PECVD deposition system was used to
produce Diamond-like carbon (DLC) film on the internal surface of
a long metal tube (200\ cm in length and 10\ cm in
diameter) employed as the deposition chamber itself. Firstly, the
features of plasma discharges and the temperature distribution
along the tube external surface were studied using argon, silane,
and acetylene. The experimental results demonstrate that a stable
discharge can be established inside the tube. It was found that
when the precursor gas is employed, a temperature gradient on the
tube surface is formed. Secondly, PECVD experiments regarding DLC
film deposition inside the inner surface of the tube are
described. For this purpose, polished stainless steel and silicon
wafer samples were mounted on the inside tube surface for
subsequent analysis of the coatings. It was found that the growth
rate and the structure properties of the DLC film varied along the
axial direction of the tube. However, surfaces of DLC film with
high sp3 content provided better tribological characteristics.
These results were mainly attributed to complex processes of local
dissociation and activation happened by collision between the
electrons and neutrals.",
doi = "10.1016/j.surfcoat.2018.12.011",
url = "http://dx.doi.org/10.1016/j.surfcoat.2018.12.011",
issn = "0257-8972",
language = "en",
targetfile = "pillaca_dlc.pdf",
urlaccessdate = "28 abr. 2024"
}